Indium Gallium Zinc Oxide, In2O3-Ga2O3-ZnO (IGZO) sputtering targets

Purity: 99.99%

​Composition: In2O3/Ga2O3/ZnO=1/1/1 at%,  2/2/1at%, 1/2/1at% or made per request

Shape: Discs, disks, step disk, delta, plate, sheets or made per drawing

Diameter: 355.6mm (14") max.

Single piece Size: Length: <500mm, Width: <250mm, Thickness: >1mm, if larger size than this, we can do it as Tiles joint by 45 degree or 90 degree

TYR will base on each different material to select the best way to made it and sure the finish ceramic sputtering target  to be best.